| 摘要 |
PROBLEM TO BE SOLVED: To provide a lead zirconate titanate (PZT) material having unique properties and applicability to a PZT thin film capacitor, for example, a ferroelectric capacitor structure such as FeRAMs.SOLUTION: A PZT material is scalable, that is, being dimensionally scalable, pulse length scalable and/or E-field scalable in character, and is useful for ferroelectric capacitors over a wide range of thicknesses, for example, from about 20 nanometers to about 150 nanometers, and a range of lateral dimensions extending to as low as 0.15 μm. The scalable PZT material may be formed by liquid delivery MOCVD without PZT film modification techniques such as a material acceptor dopant such as Nb, Ta, La, Sr, and Ca or film modifiers. |
