发明名称 RACK AND PINION MECHANISM AND VACUUM PROCESSING APPARATUS
摘要 PROBLEM TO BE SOLVED: To avoid collision between respective tooth tops of a rack gear and a pinion gear due to a phase shift between the rack gear and the pinion gear with a simple mechanism and to mesh the rack gear and the pinion gear smoothly.SOLUTION: A rack and pinion mechanism includes a rack gear 16 fixed to a stage 20 moving on a carrying track 7 while loading a carried object thereon and a plurality of pinion gears 17 connected to a drive source 13. At least two of the pinion gears are synchronized and rotate to mesh with the rack gear in sequence, whereby the rack gear is delivered from the pinion gear in the current process to the pinion gear in the subsequent process. The rack and pinion mechanism includes detection means that detects a phase difference of the pinion gear and a controller 25 which has a storage part 27, storing the detected phase difference, and controls the phase difference of the pinion gear in the subsequent process based on the phase difference of the pinion gear in the current process.
申请公布号 JP2013177975(A) 申请公布日期 2013.09.09
申请号 JP20130082814 申请日期 2013.04.11
申请人 CANON ANELVA CORP 发明人
分类号 F16H19/04;C23C14/50;C23C14/56;H01L21/677 主分类号 F16H19/04
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