发明名称 COATING HEAD AND COATING APPARATUS USING THE COATING HEAD
摘要 PROBLEM TO BE SOLVED: To provide a coating head, in which a nozzle position can be adjusted with high precision, and to provide a coating apparatus with the coating head.SOLUTION: There are provided a coating head with a plurality of nozzles, and a coating apparatus with the coating head, wherein a side wall 3423 and a slide piece 32 are prevented from contacting each other and the slide piece 32 is prevented from decreasing in rigidity, and thereby, pitches of the nozzles can be adjusted with high precision by employing: a guide groove 3421 housing the slide piece 32 holding the nozzles slidably; and the slide piece 32 such that while the slide piece 32 is housed in the guide groove 3421, a gap between the side wall 3423 of the guide groove 3421 and the slide piece 32 is wider on an opening portion side of the guide groove 3421 than on a bottom portion side of the guide groove 3421.
申请公布号 JP2013176711(A) 申请公布日期 2013.09.09
申请号 JP20120040844 申请日期 2012.02.28
申请人 DAINIPPON SCREEN MFG CO LTD 发明人
分类号 B05C5/00;H01L51/50;H05B33/10 主分类号 B05C5/00
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