发明名称 SEMICONDUCTOR DEVICE INSPECTION APPARATUS
摘要 PURPOSE: An element inspection device including an absorption pad exchanger is provided to remarkably improve productivity. CONSTITUTION: An element inspection device comprises a loading unit (100), a test unit (300), an unloading unit (500), and transmission tools (810-840). The loading unit loads a plurality of elements on one or more trays. The test unit includes a plurality of test sockets for testing each element by receiving the elements from the loading unit. The unloading unit loads the elements according to the test result of the test unit by classifying the elements. The transmission tools transmit the elements to the loading unit, the test unit, and the unloading unit. A cleaning unit is installed at the side of the test unit and eliminates foreign substances in a test socket by spraying air to the test socket. An absorption pad exchanger (900) automatically exchanges an absorption pad combined with pickers.
申请公布号 KR20130099782(A) 申请公布日期 2013.09.06
申请号 KR20120071089 申请日期 2012.06.29
申请人 JT CORPORATION 发明人 YOU, HONG JUN;SEO, YONG JIN;KIM, MIN SEONG;YOO, TAE SIK
分类号 G01R31/26 主分类号 G01R31/26
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