TWO-AXIS DRIVE MECHANISM AND DIE BONDER

摘要

PURPOSE: A biaxial driving device and a die bonder are provided to reduce a vibration due to a horizontal shaft by a simple configuration. CONSTITUTION: A first linear motor includes a first moving unit and a first fixing unit. The first moving unit moves a processing unit according to a first linear guide. A second linear motor includes a second moving unit (41) which horizontally moves the processing unit and a second fixing unit (42). A supporter (62) fixes the first fixing unit. A second linear guide (48) freely moves the second fixing unit. A linear sensor (71) senses the horizontal location of the first moving unit with regard to the supporter. A control unit controls the horizontal location of the first moving unit based on the output of the linear sensor.