LED LIGHT SOURCE APPARATUS, FILM THICKNESS MEASURING APPARATUS, AND THIN-FILM FORMING APPARATUS

摘要

Provided is an LED light source apparatus (30) for measuring film thickness, which can increase a light change quantity, and which has disposed therein: a plurality of LED light emitting sources (34-36); a plurality of collimating means (342, 352, 362), which are disposed in the downstream of the light emitting sources, respectively, and which respectively collimate and output light inputted from the light emitting sources; a plurality of first filter means (37, 38), which are respectively disposed in the downstream of the collimating means, and which output light by passing through and/or reflecting merely light of a specific wavelength region or more among the inputted light, or passing through and/or reflecting merely light of a specific wavelength region or less; a light collecting means (39), which is disposed in the downstream of the first filter means (38), and which collects and outputs light inputted from respective first filter means; and second filter means (344, 354, 364), which are disposed in the downstream of the respective collimating means (342, 352, 362), said downstream being in the upstream of respective first filter means (37, 38), and which pass through and output merely light in a specific wavelength range, said light having been inputted from the collimating means, respectively.