SEMICONDUCTOR DEVICE INSPECTION APPARATUS

摘要

PURPOSE: An element inspection device is provided to accurately set a moving location at an element pressing tool by vertically moving the element pressing tool with the rotation of a cam member. CONSTITUTION: An element pressing unit (830, 840) includes an element pressing tool and a first vertical moving device (802). The element pressing tool pressurizes a test socket by moving an element to a pressing location. The first vertical moving device moves the element pressing tool to the pressing location by using a cam member. A second vertical moving device (805) linearly moves the element pressing unit with a test unit. A control unit (807) determines the location of the element pressing tool as the pressing location when weight which is added to the test unit by the second vertical moving device is detected.