| 摘要 |
The invention relates to a method for determining a change in distance to a moving and reflective target by means of interferometry, comprising the generation of laser radiation, wherein at least one reference radiation and one measurement radiation are derived from the laser radiation, the emission of the measurement radiation to the target, and the detection of at least part of the measurement radiation reflected at the target. In addition, a superposition of the reflected measurement radiation with the reference radiation is generated and detected, an interferometer output variable is derived on the basis of the detected superposition, and a time-resolved output variable curve is produced from the derived interferometer output variable. In addition, the output variable curve is continually checked in that the output variable curve is continually read out in a time-resolved manner, at least one motion parameter for a relative motion between the measuring device and the target is derived continually in accordance with the output variable curve read out in a time-resolved manner, and the motion parameter is continually compared with a motion criterion for the target, wherein the motion criterion indicates a relative motion of the target in the direction of the measurement radiation that can actually be performed, that is practically plausible, and that is empirically accepted. Information is provided in accordance with the comparison, in particular if the motion criterion is not met. |
