摘要 |
<p>Systems and methods for forming solar cells with CuInSe2 and Cu(In,Ga)Se2 films are provided. In one embodiment, a method comprises: during a first stage (220), performing a mass transport through vapor transport of an indium chloride (InClx) vapor (143, 223) and Se vapor (121, 225) to deposit a semiconductor film (212, 232, 252) upon a substrate (114, 210, 230, 250); heating the substrate(114, 210, 230, 250) and the semiconductor film to a desired temperature (112); during a second stage (240) following the first stage (220), performing a mass transport through vapor transport of a copper chloride (CuClx) vapor (143, 243) and Se vapor (121, 245) to the semiconductor film (212, 232, 252); and during a third stage (260) following the second stage (240), performing a mass transport through vapor transport of an indium chloride (InClx) vapor (143, 263) and Se vapor (121, 265) to the semiconductor film (212, 232, 252).</p> |
申请人 |
ALLIANCE FOR SUSTAINABLE ENERGY, LLC;ABENGOA SOLAR NEW TECHNOLOGIES, S.A. |
发明人 |
ALBIN, DAVID, S.;VORA, NIRAV;JIMENEZ, SEBASTIAN CAPARROS;GUTIERREZ, JOAQUIN MURILLO;CORTEZON, EMILIO SANCHEZ;ROMERO, MANUEL |