摘要 |
<p>A Raman spectroscopic inspection device includes a light source generating light, a first optical fiber guiding an incident light incident from the light source, a coupler connected to one end portion of the first optical fiber to branch off a path of the light, a second optical fiber connected to the coupler to guide the incident light to a sample and to guide an emission light emitted from the sample, a first lens positioned between an end portion of the second optical fiber and the sample to form focuses of the incident light and the emission light, a third optical fiber connected to the coupler to guide the emission light, a detector positioned at an end portion of the third optical fiber to receive the emission light and to generate analysis data.</p> |