ABATEMENT AND STRIP PROCESS CHAMBER IN A LOAD LOCK CONFIGURATION
摘要
<p>Embodiments of the present invention a load lock chamber including two or more isolated chamber volumes, wherein one chamber volume is configured for processing a substrate and another chamber volume is configured to provide cooling to a substrate. One embodiment of the present invention provides a load lock chamber having at least two isolated chamber volumes formed in a chamber body assembly. The at least two isolated chamber volumes may be vertically stacked. A first chamber volume may be used to process a substrate disposed therein using reactive species. A second chamber volume may include a cooled substrate support.</p>
申请公布号
WO2013130191(A1)
申请公布日期
2013.09.06
申请号
WO2013US22228
申请日期
2013.01.18
申请人
APPLIED MATERIALS, INC.;SALINAS, MARTIN JEFFREY;REUTER, PAUL B.;NGUYEN, ANDREW;LEE, JARED AHMAD
发明人
SALINAS, MARTIN JEFFREY;REUTER, PAUL B.;NGUYEN, ANDREW;LEE, JARED AHMAD