发明名称 |
POSITIVE-TYPE PHOTORESIST COMPOSITION, PHOTORESIST LAMINATE, METHOD FOR PRODUCING PHOTORESIST PATTERN, AND METHOD FOR PRODUCING CONNECTING TERMINAL |
摘要 |
What is provided is a positive-type photoresist composition containing an acid generator (A) capable of generating an acid when irradiated with an active ray or radiation, a resin (B) whose solubility in alkali increases under the action of acid, and an organic solvent (S), the photoresist composition further containing an alkali-metal salt (C).
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申请公布号 |
US2013230801(A1) |
申请公布日期 |
2013.09.05 |
申请号 |
US201313774891 |
申请日期 |
2013.02.22 |
申请人 |
TOKYO OHKA KOGYO CO., LTD. |
发明人 |
SHIMIZU TAKAHIRO;WASHIO YASUSHI;KUROIWA YASUSHI;MORI TAKAYOSHI;UTSUMI YOSHIYUKI |
分类号 |
G03F7/039 |
主分类号 |
G03F7/039 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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