发明名称 POSITIVE-TYPE PHOTORESIST COMPOSITION, PHOTORESIST LAMINATE, METHOD FOR PRODUCING PHOTORESIST PATTERN, AND METHOD FOR PRODUCING CONNECTING TERMINAL
摘要 What is provided is a positive-type photoresist composition containing an acid generator (A) capable of generating an acid when irradiated with an active ray or radiation, a resin (B) whose solubility in alkali increases under the action of acid, and an organic solvent (S), the photoresist composition further containing an alkali-metal salt (C).
申请公布号 US2013230801(A1) 申请公布日期 2013.09.05
申请号 US201313774891 申请日期 2013.02.22
申请人 TOKYO OHKA KOGYO CO., LTD. 发明人 SHIMIZU TAKAHIRO;WASHIO YASUSHI;KUROIWA YASUSHI;MORI TAKAYOSHI;UTSUMI YOSHIYUKI
分类号 G03F7/039 主分类号 G03F7/039
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