| 摘要 |
A component analyzer includes a casing, a light source unit, a light incident unit guiding light from a test object into the casing, a tunable interference filter extracting light having a predetermined wavelength from the incident light, an imaging unit receiving the extracted light and taking a spectroscopic image, a control unit performing a component analysis of the test object based on the spectroscopic images, and a display displaying a component analysis result. The light incident unit, the imaging unit, and the control unit are provided within the casing. The tunable interference filter includes a fixed substrate having a fixed reflection film and a movable substrate provided to face the fixed substrate and having a movable reflection film opposed to the fixed reflection film across a gap between reflection films, and an electrostatic actuator changing the gap between reflection films.
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