PATTERN TRANSFERRING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a pattern transferring apparatus capable of repeatedly performing preferable pattern transfer.SOLUTION: A pressing part 7 presses a peripheral edge of a blanket BL to a suction plate 51 in an alignment process and a transfer process by using the weight of a pressing member 71 having a shape that can be placed on the peripheral edge of the blanket BL. A tip end of each piston 724 is loosely fitted with respect to the pressing member 71. The pressing member 71 can move on a horizontal surface. While the pressing member 71 is moved from a pressing position to a retreating position, alignment operation is performed, and the pressing member is returned to the initial position at which the pressing member 71 has been aligned. Therefore, the position of the pressing member 71 on the horizontal surface is returned to the initial position by the next pattern transfer even though the pressing member 71 is moved on the horizontal surface by the positioning by the alignment part 4.