发明名称 |
LIGHT RECEIVING ELEMENT, PROCESS OF MANUFACTURING THE SAME, AND DETECTING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a light receiving element capable of achieving a narrow pitch and improving manufacturing efficiency while reducing a dark current, and to provide a process of manufacturing the same.SOLUTION: The light receiving element comprises: a light-receiving layer 3 including a multiquantum well structure; a contact layer 5 positioned on the light-receiving layer and disposed with an electrode for each pixel; and a pixel separation adjustment layer 4 sandwiched between the light-receiving layer and the contact layer, wherein a pn junction is positioned at an interface of the pixel separation adjustment layer and the contact layer, the pixels are mutually separated by a mesa structure, and a groove K of the mesa structure includes an opening at the contact layer and a bottom in the pixel separation adjustment layer by penetrating the pn junction. |
申请公布号 |
JP2013175686(A) |
申请公布日期 |
2013.09.05 |
申请号 |
JP20120040687 |
申请日期 |
2012.02.27 |
申请人 |
SUMITOMO ELECTRIC IND LTD |
发明人 |
NAGAI YOICHI;MACHINAGA KENICHI;MORISHIMA SATORU |
分类号 |
H01L31/10;H01L27/144;H01L27/146 |
主分类号 |
H01L31/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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