发明名称 LIGHT RECEIVING ELEMENT, PROCESS OF MANUFACTURING THE SAME, AND DETECTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a light receiving element capable of achieving a narrow pitch and improving manufacturing efficiency while reducing a dark current, and to provide a process of manufacturing the same.SOLUTION: The light receiving element comprises: a light-receiving layer 3 including a multiquantum well structure; a contact layer 5 positioned on the light-receiving layer and disposed with an electrode for each pixel; and a pixel separation adjustment layer 4 sandwiched between the light-receiving layer and the contact layer, wherein a pn junction is positioned at an interface of the pixel separation adjustment layer and the contact layer, the pixels are mutually separated by a mesa structure, and a groove K of the mesa structure includes an opening at the contact layer and a bottom in the pixel separation adjustment layer by penetrating the pn junction.
申请公布号 JP2013175686(A) 申请公布日期 2013.09.05
申请号 JP20120040687 申请日期 2012.02.27
申请人 SUMITOMO ELECTRIC IND LTD 发明人 NAGAI YOICHI;MACHINAGA KENICHI;MORISHIMA SATORU
分类号 H01L31/10;H01L27/144;H01L27/146 主分类号 H01L31/10
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