| 摘要 |
PURPOSE: A jig for oxide coating a pellicle frame is provided to offer excellent usability by only replacing a contact tip when necessary. CONSTITUTION: A jig for oxide coating a pellicle frame comprises: a grip operation wire unit connected to an electrode piece (8) supplying the current for forming a plasma oxidation coating layer on the surface of a pellicle frame (4) to be electrified; and a supporting wire unit including a concave groove (4a) with a pair of point contacting units facing each other and being formed into a frame shape connected to the grip operation wire unit which is formed on the parallel edge units of the pellicle frame, and supporting the pellicle frame. |
