MIXTURE OF COBALT COMPOUND AND METHOD OF PRODUCING COBALT-CONTAINING THIN FILM USING MIXTURE OF THE COBALT COMPOUND

摘要

PROBLEM TO BE SOLVED: To provide a mixture of a cobalt compound industrially suitable for producing a cobalt-containing thin film on an object to be filmed with a simple method.SOLUTION: A mixture of bis(1-t-butylamide-2-dimethylaminobutane-N, N') cobalt, bis(2-t-butylamide-1-dimethylaminobutane-N, N') cobalt and (1-t-butylamide-2-dimethylaminobutane-N, N')(2-t-butylamide-1-dimethylaminobutane-N, N') cobalt is used and, thereby, a cobalt-containing thin film according to a CVD method can be produced.