发明名称 THIN FILM TRANSISTOR INVERTER DEVICE AND METHOD FOR MANUFACTURING THEREOF
摘要 <p>PURPOSE: An inverter device using a thin film transistor and a manufacturing method thereof are provided to improve the reproducibility of electrical characteristics by inducing an electrical characteristic difference between two thin film transistors through a gate insulation layer with a first thickness and a second thickness. CONSTITUTION: A gate electrode (120) is deposited on a substrate (110). A gate insulating layer (130) is deposited on the gate electrode with a first thickness. A semiconductor layer (140) is deposited on the gate insulation layer with the first thickness. A source electrode (152) and a drain electrode (154) are deposited on the semiconductor layer. The gate insulation layer is deposited on a gate electrode (120') with a second thickness. The first thickness is different from the second thickness. A semiconductor layer (140') is deposited on the gate insulation layer with the second thickness.</p>
申请公布号 KR20130098739(A) 申请公布日期 2013.09.05
申请号 KR20120020499 申请日期 2012.02.28
申请人 KOREA ELECTRONICS TECHNOLOGY INSTITUTE 发明人 KIM, WON KEUN;KIM, YONG HOON;LEE, JEONG NO;OH, MIN SUK;KIM, JI WAN;YOO, BYUNG WOOK
分类号 H01L29/786;H01L21/336 主分类号 H01L29/786
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