PARTITION WALL FORMATION METHOD, FORMATION METHOD OF ORGANIC EL DISPLAY PANEL USING THE SAME, AND EXPOSURE EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To prevent a functional layer from being partially missed by preventing a photo-curing material from oozing in a process of forming a partition wall.SOLUTION: (a) A photo-curing material layer 6b is formed on a base substrate and a partition wall scheduled part at the photo-curing material layer 6b is selectively exposed. (b) By developing the exposed photo-curing material layer, a partition wall scheduled part is kept remained and a portion other than the partition wall scheduled part is removed. (c) In a state where the portion other than the partition wall scheduled part is being removed, side faces of the remaining partition wall scheduled part are exposed.