发明名称 VAPOR-DEPOSITION MASK, AND METHOD FOR MANUFACTURING VAPOR-DEPOSITION MASK
摘要 PROBLEM TO BE SOLVED: To form a high-definition thin film pattern.SOLUTION: A vapor-deposition mask 1 for forming a film by arranging a plurality of stripe-shaped thin-film patterns parallel to each other at a constant arrangement pitch on a substrate, includes: a resin film 2 that has a through opening 4 formed therein, the through openings being arranged at the same arrangement pitch as the arrangement pitch of the thin-film patterns and having the same formed dimensions as the thin-film pattern, wherein the resin film passes visible light; and a plurality of magnetic metal members 3 provided by being dispersed at a surface 2a of the film 2 or inside the film 2, in an outside part of the plurality of through openings 4.
申请公布号 JP2013173968(A) 申请公布日期 2013.09.05
申请号 JP20120038101 申请日期 2012.02.24
申请人 V TECHNOLOGY CO LTD 发明人 MIZUMURA MICHINOBU;KUDO SHUJI
分类号 C23C14/04;H01L51/50;H05B33/10 主分类号 C23C14/04
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