| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a liquid jetting head provided with a piezoelectric element having a piezoelectric layer having a small environmental load and suppressed generation of crack.SOLUTION: A method of manufacturing a liquid jetting head comprising a pressure generation chamber in communication with a nozzle opening and a piezoelectric element provided with a piezoelectric layer and an electrode comprises: a step of forming a first piezoelectric precursor film containing Bi and Fe or Ba and Ti; a step of forming a first piezoelectric layer by heating and crystallizing the first piezoelectric precursor film; a step of forming a second piezoelectric precursor film containing at least one selected from Li, B, and Cu, in addition to Bi and Fe or Ba and Ti contained in the first piezoelectric precursor film on the first piezoelectric layer; and a step of forming the piezoelectric layer by heating and crystallizing the first piezoelectric layer and the second piezoelectric precursor film. |
