GATE VALVE

摘要

PURPOSE: A gate valve is provided to enable the isolation of vacuum equipment and to minimize the generation of particles. CONSTITUTION: A gate valve comprises a valve unit (200), an operation unit (300), a guide unit (400), and a drive unit (500). The valve unit opens and closes an opening where a board passes through. The operation unit is coupled to the valve unit and opens and closes the valve unit. The guide unit is coupled to the operation unit and has a guide groove for guiding the operation unit. The drive unit is coupled to the operation unit and moves the operation unit in a first direction.