| 摘要 |
PROBLEM TO BE SOLVED: To provide a fitting mechanism capable of easily and accurately fitting a load port device to a semiconductor processing device.SOLUTION: On one of a load port device and a fitting surface, a V-like disc receiving groove which has a formation axis that extends along the direction vertical to the fitting surface and opens in a given direction is arranged, while a disc-like support point disc whose one portion of outer periphery is engaged with the disc receiving groove is arranged on the other. Further, a holder groove arranged in the direction parallel to the fitting surface with a support point part in between and respectively extends in the direction is arranged on one, while a regulation shaft extending in the parallel direction and capable of engaging with the holder groove is arranged on the other. |
