| 摘要 |
PROBLEM TO BE SOLVED: To provide an in-line type device for manufacturing a magnetic recording medium which can convey a carrier in high speed, has high exhaust capacity in depositing rooms, and can easily ensure a high degree of vacuum in a short period of time.SOLUTION: A device for manufacturing a magnetic recording medium comprises: a plurality of depositing rooms connected with each other; a carrier for holding a substrate; a mechanism for mounting the substrate before deposition on the carrier; a mechanism for successively conveying the carrier into the plurality of depositing rooms connected with each other; and a mechanism for removing the substrate after the deposition from the carrier. In the device for manufacturing the magnetic recording medium, a linear motor is used for the mechanism for conveying the carrier, a function for holding the carrier not to fall due to its own weight is added to the linear motor, and a guide for holding the carrier not to fall due to its own weight is set in the depositing rooms. |
