| 摘要 |
A method for manufacturing a contact probe includes: a lithography step of obtaining a resin mold by forming a pattern for the contact probe, a pattern for a tie bar in a shape of a frame therearound, and a pattern for a coupling portion coupling these two patterns, in a resist formed on a conductive substrate, by lithography; an electroforming step of forming a layer made of a metal material on the resin mold by electroforming to form a metal structure in which the contact probe is integral with the tie bar at the coupling portion; a removal step of removing the resin mold and the conductive substrate; a plating step of forming a plating layer on a surface of the metal structure by electroplating after the removal step; and a separation step of separating the contact probe from the metal structure after the plating step.
|
