PARTICULATE ALLOY THIN FILM AND THEIR MANUFACTURING METHOD

摘要

PURPOSE: An alloy granulated thin film and a manufacturing method thereof are provided to supply an alloy thin film which forms an insulation layer with high specific resistance as well as high magnetic flux density. CONSTITUTION: A manufacturing method of an alloy granulated thin film comprises the following steps. An alloy thin film which is formed on a solid substrate is treated with heat by supplying hydrogen including vapor to an alloy thin film (230). A part of first solute elements which have large oxygen effinity are selectively oxidized. The alloy thin film is granulated to form an insulation layer. The oxidized first solute elements form an insulation layer (240) on a granulated alloy thin film and a solid substrate after the alloy thin film is granulated. [Reference numerals] (210) Arrange an alloy thin panel and perform the purging of devices; (220) Generate a gas mixture of hydrogen and vapor; (230) Heat treatment; (240) Generate an alloy grained thin film