| 摘要 |
A cleaning composition for cleaning a surface, on which aluminum or aluminum-containing alloy is exposed, is provided to remove organic and inorganic contaminants and particles, while not causing corrosion of aluminum or aluminum alloy interconnections. A cleaning composition for cleaning a surface, on which aluminum or aluminum-containing alloy is exposed, comprises a reducing agent and an alkaline compound, wherein the content of the reducing agent is greater than the content of the alkaline compound on the weight percent basis. Preferably, the ratio of the content(wt%) of the reducing agent (A)/the content(wt%) of the alkaline compound(B) is at least 1.1. The alkaline compound and the reducing agent are used in an amount of 0.05-2 wt% and 0.1-5 wt%, respectively, based on the total weight of the cleaning composition. |
