发明名称 Evaporation Apparatus For Organic Light Emitting Display
摘要 An embodiment of this document provides a deposition apparatus for an organic electroluminescent display device, comprising a vacuum chamber, a deposition source placed on a bottom within the vacuum chamber, a mask configured to mask a source generated by the deposition source, a target substrate on which the source passing through the mask is deposited, a first plate placed on an upper side within the vacuum chamber, wherein magnets are arranged with them being spaced apart from each other on one side of the first plate, and a second plate placed below the first plate, wherein grooves into which the respective magnets are inserted are formed in the second plate.
申请公布号 KR101303447(B1) 申请公布日期 2013.09.05
申请号 KR20090004844 申请日期 2009.01.21
申请人 发明人
分类号 C23C14/24;H01L51/56;H05B33/10 主分类号 C23C14/24
代理机构 代理人
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