| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface shape measuring device having a configuration more simple than a conventional device.SOLUTION: A surface shape measuring device 10 is equipped with: a light source 12 which irradiates a surface to be measured 26 with light; a light receiver 20 which receives reflection light from the surface to be measured 26; and an arithmetic section 22. Further, the device is also equipped with a first optical element G1 having a first grating 28a and a second optical element G2 having a second grating 28b which are provided on an optical path between the light source 12 and the surface to be measured 26. The arithmetic section 22 calculates angle &thetas; of the surface to be measured 26 based on the first grating 28a and the second grating 28b, the positions of the first grating 28a and the second grating 28b, and brightness corresponding to the positions. |
