发明名称 DETECTION DEVICE, DETECTION METHOD, AND METHOD FOR MANUFACTURING STRUCTURE
摘要 PROBLEM TO BE SOLVED: To provide a detection device capable of suppressing a deterioration in detection accuracy, a detection method, and a method for manufacturing a structure.SOLUTION: A measuring instrument for irradiating an X-ray to a measuring object from an X-ray source to detect a transmission X-ray transmitting the measuring object, and forming an image based on the transmission X-ray is provided, and control of the measuring instrument is corrected on the basis of position information of the X-ray source.
申请公布号 JP2013174495(A) 申请公布日期 2013.09.05
申请号 JP20120038791 申请日期 2012.02.24
申请人 NIKON CORP 发明人 AOKI TAKASHI;SUZUKI KAZUAKI;SAKAGUCHI TADASHI;WATABE TAKASHI
分类号 G01N23/04 主分类号 G01N23/04
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