发明名称 SHAPE MEASURING DEVICE, SHAPE MEASURING METHOD, STRUCTURE MANUFACTURING METHOD, AND PROGRAM
摘要 To simplify setting processing (teaching processing) of setting a measurement area to be measured with respect to an object to be inspected. A form measuring apparatus is provided with: a detecting section (20) which performs detection of a surface form of a surface of an object having a three-dimensional form; and an area-setting section (58) which sets, as a measurement area, an adjacent area adjacent to a predetermined designated area, based on a form measurement data of the form detected in the predetermined designated area.
申请公布号 EP2634530(A1) 申请公布日期 2013.09.04
申请号 EP20110836416 申请日期 2011.10.27
申请人 NIKON CORPORATION 发明人 KANTO, KENTA
分类号 G01B21/20;G01B5/008;G01B11/24;G01B21/04 主分类号 G01B21/20
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