发明名称 |
SHAPE MEASURING DEVICE, SHAPE MEASURING METHOD, STRUCTURE MANUFACTURING METHOD, AND PROGRAM |
摘要 |
To simplify setting processing (teaching processing) of setting a measurement area to be measured with respect to an object to be inspected. A form measuring apparatus is provided with: a detecting section (20) which performs detection of a surface form of a surface of an object having a three-dimensional form; and an area-setting section (58) which sets, as a measurement area, an adjacent area adjacent to a predetermined designated area, based on a form measurement data of the form detected in the predetermined designated area. |
申请公布号 |
EP2634530(A1) |
申请公布日期 |
2013.09.04 |
申请号 |
EP20110836416 |
申请日期 |
2011.10.27 |
申请人 |
NIKON CORPORATION |
发明人 |
KANTO, KENTA |
分类号 |
G01B21/20;G01B5/008;G01B11/24;G01B21/04 |
主分类号 |
G01B21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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