DETECTOR, IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

摘要

PURPOSE: A detecting device, an imprinting device, and a product manufacturing method are provided to defect the relative positions of two objects at high precision. CONSTITUTION: A detecting device (3) includes a lighting optical system (22) and a detection optical system (21). The lighting optical system diagonally lightens a first mark (10) arranged on a first object (7) and a second mark (11) arranged on a second object (8). The detection optical system detects coherent lights generated by light beams refracted by the first and second marks which are lightened by the lighting optical system. The lighting optical system forms light intensity distribution including one or more poles on a pupil plane of the lighting optical system and includes an aperture having an opening on a pupil plane of the detection optical system. A shape of the opening includes a side parallel to a first direction.