SEMICONDUCTOR HEATER MANUFACTURING METHOD AND HEATER THEREUSING

摘要

PURPOSE: A method for manufacturing a heater for a semiconductor manufacturing apparatus and the heater manufactured by the same are provided to improve a surface property, thereby improving manufacturing efficiency. CONSTITUTION: The surface of a heater is planarized. The planarized heater surface is heated. A photosensitive film is bonded onto the heated surface of the heater. A printed pattern film is bonded onto the photosensitive film. An ultraviolet ray is irradiated to the photosensitive film.