| 摘要 |
PURPOSE: A manufacturing method of nano-structure is provided to manufacture the various shaped nano-structures by simple processes. CONSTITUTION: A manufacturing method of nano-structure comprises the following steps: coating a plurality of nano-particles(41) on nano-patterned frames(20) which have convex parts(21) and recesses(22); forming a nano-seed layer pattern by transcribing the nano-particles on a substrate(100); and forming a nano-structure by growing the nano-seed layer pattern on the substrate. The first step comprises the following steps: adhering the nano-particles on the convex parts and recess parts of the nano-patterns by locating the nano-patterns inside a seed vessel; washing the nano-pattern frame; and drying the nano-pattern frame. |
