发明名称 |
PRECURSOR FOR PREPARING THE SNS THIN-FILM AND MANUFACTURING METHOD THEREOF |
摘要 |
PURPOSE: A tin sulfide thin film containing a precursor is provided to obtain a high purity tin sulfide thin film of a single phase through chemical vapor deposition. CONSTITUTION: A precursor for forming a tin sulfide thin film contains a structure of chemical formula 1. The precursor is an asymmetric structure. A method for manufacturing the thin film comprises the step of forming the thin film through deposition of the precursor. The deposition is a chemical vapor deposition. |
申请公布号 |
KR20130097904(A) |
申请公布日期 |
2013.09.04 |
申请号 |
KR20120019547 |
申请日期 |
2012.02.27 |
申请人 |
CHUNG-ANG UNIVERSITY INDUSTRY-ACADEMY COOPERATIONFOUNDATION |
发明人 |
SHIM, IL WUN;PARK, JONG PIL;SONG, MI YEON;JUNG, WON MOK |
分类号 |
C07F7/22;C23C16/06;H01L31/042 |
主分类号 |
C07F7/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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