发明名称 PRECURSOR FOR PREPARING THE SNS THIN-FILM AND MANUFACTURING METHOD THEREOF
摘要 PURPOSE: A tin sulfide thin film containing a precursor is provided to obtain a high purity tin sulfide thin film of a single phase through chemical vapor deposition. CONSTITUTION: A precursor for forming a tin sulfide thin film contains a structure of chemical formula 1. The precursor is an asymmetric structure. A method for manufacturing the thin film comprises the step of forming the thin film through deposition of the precursor. The deposition is a chemical vapor deposition.
申请公布号 KR20130097904(A) 申请公布日期 2013.09.04
申请号 KR20120019547 申请日期 2012.02.27
申请人 CHUNG-ANG UNIVERSITY INDUSTRY-ACADEMY COOPERATIONFOUNDATION 发明人 SHIM, IL WUN;PARK, JONG PIL;SONG, MI YEON;JUNG, WON MOK
分类号 C07F7/22;C23C16/06;H01L31/042 主分类号 C07F7/22
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