METHOD FOR DIVIDING CERAMICS SUBSTRATE

摘要

PURPOSE: A method for dividing a ceramics substrate is provided to efficiently divide a ceramics substrate by scribing the ceramics substrate with less than 50% of crack penetration and breaking the substrate. CONSTITUTION: A method for dividing a ceramics substrate is as follows. A ceramics substrate is scribed with less than 50% of crack penetration using a scribing wheel. The scribing wheel has a blade end having an angle of 135 degrees. The ceramics substrate is broken along the scribing line formed by the scribing wheel. [Reference numerals] (AA) Average roughness a (μm) of a center line R of a cross section; (BB) Selection area; (CC) Crack penetration rate (%)