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发明名称
SCAN METHOD
摘要
<p>In general, in one aspect, the disclosure features a method and system for imaging of samples, for example, imaging samples with charged particles.</p>
申请公布号
EP2433293(B1)
申请公布日期
2013.09.04
申请号
EP20100719574
申请日期
2010.05.04
申请人
CARL ZEISS MICROSCOPY, LLC
发明人
WARD, BILLY, W.
分类号
H01J37/26;H01J37/28
主分类号
H01J37/26
代理机构
代理人
主权项
地址
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