INSPECTION APPARATUS AND INSPECTION METHOD OF ATTACHED SUBSTRATE

摘要

PURPOSE: A device and a method for testing an attached board are provided to determine whether defects exists on an attached layer itself or defects are generated by an upper layer of the attached layer, thereby detecting only the defects existing on the attached layer itself. CONSTITUTION: A device (100) for testing an attached board includes an optical system (110), a photographing unit (120), and a defect testing unit (130). The optical system emits lights on the lateral surface and the front surface of an attached board (10). The photographing unit obtains images of the attached board by using the lights emitted to the front and lateral surfaces by the optical system. The defect testing unit detects the defects on the attached board based on the images of the attached board obtained by the photographing unit. [Reference numerals] (131) Defective candidate extracting unit; (132) Defect determining unit; (140) Defect analyzing unit; (150) Error determining unit