发明名称 |
MICROMACHINED ASSEMBLY WITH A MULTI-LAYER CAP DEFINING CAVITY |
摘要 |
<p>This invention comprises a process for fabricating a micro mechanical structure in a sealed cavity having a multi-layer high stiffness cap. The high stiffness material used for the cap protects the underlying microstructure from destructive environmental forces inherent in the packaging process and from environmental damage.</p> |
申请公布号 |
EP1602124(B1) |
申请公布日期 |
2013.09.04 |
申请号 |
EP20040714627 |
申请日期 |
2004.02.25 |
申请人 |
IC MECHANICS, INC. |
发明人 |
CARLEY, RICHARD, L.;SANTHANAM, SURESH |
分类号 |
H01L21/00;B81B7/02;B81C1/00;H01L;H01L21/4763;H01L29/84 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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