TRANSFERING APPARATUS FOR BOARDS

摘要

PURPOSE: A board transfer apparatus is provided to reduce time required for transferring boards or wafers by enabling the simultaneous transfer of multiple boards in a process chamber. CONSTITUTION: A board transfer apparatus comprises a drive unit (30), a power transfer unit (40), and a housing (42). The drive unit is installed in a process chamber (10) and generates torque. The power transfer unit is installed inside of the process chamber and is connected to the drive unit to transfer the torque generated from the drive unit to multiple rollers (50) for transferring a board (2). The housing seals the power transfer unit in the process chamber.