| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide element which stabilizes DC drift, does not complicate a manufacturing process, and controls product characteristics accurately, and to provide a method of manufacturing the same. SOLUTION: An optical waveguide element comprises a substrate 1 having an electro-optical effect, an optical waveguide 2 formed on the substrate, a buffer layer 5 formed on the optical waveguide and having SiO<SB POS="POST">2</SB>as main material, and modulation electrodes 3,4 formed on the buffer layer and modulating light waves propagating through the optical waveguide. On the substrate side of the buffer layer, an area 6 is formed so that the content of Li becomes 1×10<SP POS="POST">21</SP>(atoms/cm<SP POS="POST">3</SP>) or more. COPYRIGHT: (C)2013,JPO&INPIT |
