| 摘要 |
PROBLEM TO BE SOLVED: To detect a malfunction such as a damage on either one of sliders on the basis of only a vibration signal obtained from one detection point even in a direct drive device having the plurality of sliders. SOLUTION: In a method for detecting the malfunction, one vibration sensor 10 is attached to the direct drive device 1 so as to measure a vibration at a time when the direct drive device 1 operates. A malfunction such as a damage on either one of the sliders 4 is detected on the basis of a magnitude of a vibration signal that is obtained from an output of the single vibration sensor 10 by removing a frequency component not lower than a natural frequency of a spring-mass system having a movable table 5 as a mass and the plurality of sliders 4 as a spring. COPYRIGHT: (C)2010,JPO&INPIT |
