| 摘要 |
A cassette transport apparatus closes an opening for the access of a substrate of the cassette when the cassette for accommodating the substrates is conveyed from a frame to a substrate transport operation part. Therefore, in the conveying process, the ambient air in the cassette can be kept well. On a lifting transporter (15), a cassette transport supporting bracket (20) which horizontally advances and retreats freely is provided between a retreating position on the lifting transporter (15) and an advancing position for advancing to a transverse side. The utility model is characterized in that: on the lifting transporter (15), a supporting part (turntable (16)) which horizontally supports a cassette transport supporting bracket (20) is provided with a cover (22). The cover (22) closes a substrate access opening (6a) of the cassette (6) which is supported on the cassette transport supporting bracket (20) and is transported to a certain position of the lifting transporter (15). |
