| 摘要 |
PURPOSE: A mass analysis device and system operating for focusing a ribbon ion beam and separating desired ion types from unwanted ion types in the ribbon ion beam provide a combination of focusing, mass selection, and control of uniformity in a single device. CONSTITUTION: An E-block-coil combination unit includes an E-shaped block mounting unit (1) and an oblong-shaped closed coil (2). The E-shaped block mounting unit is made of ferromagnetic materials with an exposed block face having parallel raised ridges (13,15,17) and parallel recessed channels (12,14). A magnetic field generating unit is inserted into the structure of the E-shaped magnetic block mounting unit in the transverse direction and arranged in an x-z plane of the E-shaped block mounting unit. The E-shaped block mounting unit is extended in the x-axis direction with a greater distance than the x-axis size of a moving charged particle beam which passes a device at a short distance. |
