| 摘要 |
PURPOSE: A pellicle for extreme UV is provided to have a high transmittance to the extreme UV, and not to be easily damaged without being supported by a separate base substrate as a metallic foil with a high flexibility is used. CONSTITUTION: A pellicle for extreme UV comprises a pellicle film (10) in which UV transmits, and a pellicle frame (20) supporting the pellicle film. The pellicle film is zirconium metallic foil or molybdenum metallic foil having 100 nm or less of thickness. A manufacturing method of the pellicle comprises a step of forming a zirconium metallic foil layer or a molybdenum metallic foil layer having 100 nm or less of thickness on a substrate; and a step of forming an exposure area in which the extreme UV is transmittable by removing the central part of the substrate and exposing the metallic foil layer. |
