发明名称 Oxide substrate and manufacturing method therefor
摘要 Some aspects of the invention provide an oxide substrate having a flat surface at the atomic layer level, and suited to forming a thin film of a perovskite manganese oxide. One aspect of the invention provides a single-crystal oxide substrate 10 having a single-crystal supporting substrate 1 of (210)-oriented SrTiO3 and a single-crystal underlayer 2 of (LaAlO3)0.3-(SrAl0.5Ta0.5O3)0.7, which is LSAT, formed on the (210) plane surface of the supporting substrate. In another aspect of the present invention, the LSAT underlayer 2A is formed in an amorphous state. Other aspects of the invention are also disclosed.
申请公布号 US8524382(B2) 申请公布日期 2013.09.03
申请号 US201313765156 申请日期 2013.02.12
申请人 FUJI ELECTRIC CO., LTD. 发明人 OGIMOTO YASUSHI
分类号 B32B9/00;B32B19/00;C23C14/30;C30B23/00;C30B25/00;H05B7/00 主分类号 B32B9/00
代理机构 代理人
主权项
地址