Flow-through liquid ejection using compliant membrane transducer

摘要

A method of ejecting liquid includes providing a liquid dispenser including a substrate and a diverter member. Portions of the substrate define a liquid supply channel and a liquid return channel. The diverter member includes a MEMS transducing member positioned in contact with a compliant membrane. The compliant membrane is anchored to the substrate such that the compliant membrane forms a portion of a wall of the liquid dispensing channel. A continuous flow of liquid is provided from a liquid supply through the liquid supply channel through the liquid dispensing channel through the liquid return channel and back to the liquid supply. The diverter member is selectively actuated to divert a portion of the liquid flowing through the liquid dispensing channel through outlet opening of the liquid dispensing channel when drop ejection is desired.