| 发明名称 |
Silicon-germanium hydrides and methods for making and using same |
| 摘要 |
The present invention provides novel silicon-germanium hydride compounds, methods for their synthesis, methods for their deposition, and semiconductor structures made using the novel compounds.
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| 申请公布号 |
US8524582(B2) |
申请公布日期 |
2013.09.03 |
| 申请号 |
US201213407195 |
申请日期 |
2012.02.28 |
| 申请人 |
KOUVETAKIS JOHN;RITTER, III COLE J.;THE ARIZONA BOARD OF REGENTS |
发明人 |
KOUVETAKIS JOHN;RITTER, III COLE J. |
| 分类号 |
C01B33/00;C30B25/02 |
主分类号 |
C01B33/00 |
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