发明名称 Device and method for forming Fins in integrated circuitry
摘要 A semiconductor FinFET device includes a plurality of gate lines formed in a first direction, and two types of fin structures. A first type of fin structures is formed in a second direction, and a second type of fin structures formed perpendicular to the first type of fin structures. A contact hole couples to one or more of the second type of fin structures.
申请公布号 US8525267(B2) 申请公布日期 2013.09.03
申请号 US20100953148 申请日期 2010.11.23
申请人 WANG CHIEN-HSUN;CHANG CHIH-SHENG;LIN YI-TANG;SHIEH MING-FENG;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 WANG CHIEN-HSUN;CHANG CHIH-SHENG;LIN YI-TANG;SHIEH MING-FENG
分类号 H01L29/66 主分类号 H01L29/66
代理机构 代理人
主权项
地址