发明名称 SYSTEM AND METHOD FOR PRODUCING BUBBLE FREE LIQUIDS FOR NANOMETER SCALE SEMICONDUCTOR PROCESSING
摘要 A system for producing bubble free liquid includes a continuous liquid source and a de-bubbling chamber. The de-bubbling chamber includes an outlet and an inlet. The inlet coupled to an outlet of the continuous liquid source by a supply pipe. The de-bubbling chamber also includes at least one port in a sidewall of the de-bubbling chamber. The at least one port being at least a length L from the inlet of the de-bubbling chamber. A method for producing bubble free liquid is also described.
申请公布号 KR101292841(B1) 申请公布日期 2013.09.03
申请号 KR20077030723 申请日期 2006.06.12
申请人 发明人
分类号 B01D19/00;B82Y30/00 主分类号 B01D19/00
代理机构 代理人
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